Introduction of photoemission electron microscopes at SPring-8 for nanotechnology support

Two photoemission electron microscopy (PEEM) systems with different characteristics have been introduced in SPring-8 for a nanotechnology support project. One is an easy to use system (ELMITEC PEEMSPECTOR), which is equipped with an electrostatic lens. The other one is a high end system spectroscopic photoemission and low energy electron microscope (ELMITEC LEEM/PEEM III), which is equipped with a magnetic lens and an energy filter. Test experiments have been done using the PEEM systems and high quality x-rays at SPring-8. In this paper, some experimental results will be presented.