Buckled cantilevers for out-of-plane platforms

In this paper, we show how surface-micromachined buckled cantilevers can be used to construct out-of-plane structures. We include the relevant theory necessary to predict the height and angle of plates attached to buckled cantilevers, as well as the mechanical stresses involved in assembly. These platforms can be assembled to any angle between 0 degrees and 90 degrees with respect to the substrate by changing the attachment point and the amount of deflection. Example devices were fabricated using PolyMUMPs(TM) and assembled. Using these devices, the deflection of the buckled cantilevers was verified, as well as the placement for raised platforms.