对流—扩散传质对微电铸镀层均匀性的影响
Transducer and Microsystem Technologies(2010)
Abstract
利用有限元分析软件FLUENT对MEMS微电铸镀层均匀性进行了分析。对当物质传输成为金属沉积的控制步骤时,进行对流—扩散传质过程数值模拟,研究不同深宽比微结构中对流—扩散对传质的影响。模拟结果表明:当对流—扩散传质成为控制步骤时,渗透流影响镀层基本形貌,回流会引起镀层形貌的微小起伏。
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Key words
micro-electroforming,vortices flow,convective-diffusive mass transfer,penetration flow
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