Etching of ${\rm MgB}_{2}$ Thin Films for Transition Edge Superconducting Bolometer Fabrication

Membrane-structured superconducting MgB2 thin films are potential candidates for the development of moderately cooled bolometers sensitive to far infra-red radiation. On the path to developing such devices, we present a comparison of three etching techniques for MgB2 thin films namely, chlorine plasma etch, aqueous hydrochloric acid etch and an aqueous nitric acid etch. Out of the three etch techn...