From FIB-SIMS to SIMS-FIB. The prospects for a 10 nm lateral resolution SIMS instrument with full FIB functionality

The FEI FIB (200) SIMS instrument is described herein, and its modes of operation outlined. The issues involved in achieving high lateral resolution analysis with good sensitivity are presented, and some examples of applications in materials science discussed. The possibility of a manufacturer developing a dedicated SIMS-FIB instrument, i.e. a 10 nm lateral resolution SIMS instrument incorporating an FIB gun and FIB SIMS functionality (analysis, milling and channeling contrast) is explored. Copyright (C) 2010 John Wiley & Sons, Ltd.