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气态二聚体裂解温度对Parylene C膜力学和透气性能的影响

Polymer Materials Science & Engineering(2011)

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Abstract
通过控制气态环状二聚体原料的裂解温度,在不同裂解温度下合成Parylene C膜,分析了裂解温度对膜的微观组织、拉伸性能和透气性能的影响。研究结果表明,当温度低于600℃时,原料裂解不充分,膜中存在大量未裂解原料的球状聚集体,导致膜的拉伸强度降低,气体透过率较高;当裂解温度达到720℃,气态原料存在部分过度裂解,裂解温度在630℃~690℃时,原料的裂解较充分,而且过裂解程度较小,制备的膜综合性能优异。
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Key words
gas transmission,chemical vapour deposition,Parylene C,pyrolysis temperature
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