Fabrication Of A Hybrid Field-Effect Structure For Gas-Detection With Diverse Sensitive Materials

We have developed a novel hybrid technique for manufacturing gas-sensing field-effect structures with an air gap. It is possible to find an optimum non-critical range for all technological parameters to ensure reliable evaluation of a work-function response caused by a gas reaction. To prove the efficiency of the device, room-temperature gas measurements with the well-known Pt (sensitive layer) and H-2 (gas) system have been carried out. Samples that are identically produced show reproducible signals of the same magnitude. Simultaneously we have recorded the electrical response of a platinum-coated Kelvin probe. It is shown that the results are transferable to those obtained by the Kelvin probe.