Au implantation into various types of silicate glasses

The implantation of gold ions into three types of silicate glass was studied. The energies of the implanted Au+ ions were 1701keV, and the fluences of the ions were 1×1014, 1×1015, 3×1015 and 1×1016cm−2. The as-implanted samples were annealed in air at two temperatures (400 and 600°C). The Au concentration depth profiles were investigated using Rutherford Backscattering Spectrometry (RBS) and compared to simulated profiles from the SRIM. The structural changes were studied by UV–vis absorption spectroscopy. The obtained mono-mode waveguides were characterised using Dark Mode Spectroscopy at 671nm to yield information on the refractive index changes. The results showed interesting differences depending on the type of glass and the post-implantation treatment. The obtained data were evaluated on the basis of the structure of the glass matrix, and the relations between the structural changes, waveguide properties and absorption, which are important for photonics applications, were formulated.