DEPOSITION OF BINARY AND TERNARY OXIDE THIN FILMS OF TRIVALENT METALS BY ATOMIC LAYER EPITAXYMinna Nieminenmsra（2001）引用 29|浏览1暂无评分关键词thin film,atomic layer epitaxyAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
