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Scanning-spatial-phase alignment for zone-plate-array lithography

Rajesh Menon,Euclid E. Moon,Mark K. Mondol,Fernando J. Castaño,Henry I. Smith

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B（2004）

Cited 21|Views6
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Abstract
In this article, we describe a technique for level-to-level alignment in zone-plate-array lithography, that does not require an external microscope, yet provides overlay superior. to conventional microscopes. (C) 2004 American Vacuum Society.
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scanning-spatial-phase,zone-plate-array
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