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CaO-SiO2-B2O3基板材料制备的研究

Lihua Zhang,Huajiang Jin

Semiconductor Technology（2010）

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Abstract
研究高温熔融法制备的CaO-B2O3-SiO2与溶胶凝胶法(sol-gel)法制备的CaO-B2O3-SiO2按不同比例制备的复相陶瓷,在850℃烧结温度下的晶相组成、微观结构、烧结性能、介电性能与导电浆料的匹配性.结果表明高温熔融法制备的CaO-B2O3-SiO2晶相含有大量的CaSiO3与少量的CaB2O4.添加sol-gel法制备的CaO-B2O3-SiO2后晶相无明显变化,但经SEM分析CaSiO3晶相长大,改善了体系的烧结性能与介电性能.当添加量为15.5%,在1 MHz下,可获得εr=5.80,tgδ=0.46× 10-4.
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Key words
dielectric properties,sintering properties,low-temperature sintering,high-temperature melting method,sol-gel method
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