Orientation fluctuation trend of Pt and ZnO layers in film bulk acoustic resonator
Physica B: Condensed Matter(2007)
摘要
ZnO-based film bulk acoustic resonator (FBAR) was fabricated with many ZnO/Pt layers by magnetron sputtering. All the layers are good crystallized and highly textured. By crystallographic test, the orientation fluctuation of Pt layer increases with increasing film thickness or stack layers, whereas that of ZnO layer decreases slightly. It is consistent with ZnO grain c-axis tilting observed using transmission electron microscopy. Due to these good quality layers, the device has a high resonate frequency of 3.94GHz.
更多查看译文
关键词
81.05.Dz,81.15−z,43.90.+v
AI 理解论文
溯源树
样例
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要