Nitrogenated Amorphous Carbon Films Synthesized By Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition

Nitrogenated amorphous carbon (a-CNx:H) films were investigated as protective overcoats for industrial applications. Thin a-CNx:H films have been deposited on silicon by electron cyclotron resonance plasma-enhanced chemical vapor deposition. The substrate bias was found to play an important role in determining the chemical compositions and mechanical properties of the films. The surface roughness and hardness of the films can reach 1.4 Angstrom and 20 GPa, respectively. The influence of mechanical properties by hydrogen was studied. A correlation exists between the background slope of Raman spectra and the hydrogen content as determined by elastic recoil detection analysis. (C) 1999 Elsevier Science S.A. All rights reserved.