激光诱发前向转移技术在电子制造领域的应用
Electronics Process Technology(2013)
Abstract
激光诱发前向转移是基于激光的诱导作用实现微量物质转移的技术。转移过程中激光与薄膜材料发生相互作用,使薄膜从源透明基板上剥离,转移到目标基板上,发生转移的薄膜最终在目标基板上发生沉积。作为微细加工的一种手段,激光诱发前向转移技术具备制作微小结构的能力,能实现金属、有机物、半导体和生物材料等多种材料的转移和图形制作,在电子制造领域有着广阔的应用前景。
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Key words
Electronics fabrication,Laser induced forward transfer,Thin film,Micromachining
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