Mg–C films deposited by radio-frequency sputtering

Novel carbon-doped magnesium (Mg-C) films were prepared by radio-frequency magnetron sputtering on a glass substrate using elementally composed targets of carbon and magnesium plates, and the film properties were examined. Mg-C films with various compositions were successfully deposited at low substrate temperature by controlling the area ratio of the carbon and magnesium plates. The structural and optical properties of the films were greatly modified by carbon doping, resulting in an amorphous optically transparent film. (c) 2007 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.