Application of three-grating optical system in angle metrology
Modern Electronics Technique（2012）
摘要
The photoelectric rotary encoder is commonly used as angle measuring device in the current angle metrological work.However,the grating-system has been recognized by the metrology field due to its high resolution,good stability,low error rate and good environmental adaptability.To satisfy the requirements of the precise error processing of metrological work and thorough analysis of uncertainty sources,the adaptive filtering method for the sine wave output signal is proposed based on the principle of three-grating system.
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关键词
adaptive filtering,three-grating,angle metrology,diffraction
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