CHARACTERIZATION AND CLEANING CONTROL OF OPTICAL COATINGS BY USING A GONIOMETRIC LIGHT SCATTER INSTRUMENT WITH SAMPLE IMAGING ABILITY

The principle of a new scattering measurement system including a mobile lighting and a fixed CCD array is described. This new system allows a spatially resolved light scattering characterization. Moreover it is possible to separate localized defects contribution from the local roughness measurement. The comprehensive characterization of optical coatings can be performed with this set-up, and some examples will be given.