A Model For Damage Caused By Cluster Implantation: Non-Linear Effect Due To Damage Overlap
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms（2006）
摘要
We have developed a mathematical approach to predict the non-linear damages caused by cluster ion-solid interaction. It is based on the Gibbons overlap model, and assuming that two cascades must overlap to form complete disorder and that the level of overlapping is determined by the volume ratio between the cascade from a single atom and the averaged cascades of atoms in the cluster. The calculated results agree well with our experimental data. (c) 2005 Elsevier B.V. All rights reserved.
更多查看译文
关键词
cluster implantation,cluster ion-solid interaction,non-linear damages
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要