Radio-frequency discharges in magnetic fields
Il Nuovo Cimento(2008)
摘要
Summary Measurements on radio-frequency discharges in argon have been performed by using a magnetic field normal to the r.f. electric
field. The power absorbed by the discharge has been determined as a function of the pressure inside the chamber and the magnetic
fields: different curves have been obtained by increasing or decreasing the pressure. Different geometrical arrangements have
been used. The qualitative behaviour of the discharge has been interpreted by using an average electron picture.
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关键词
magnetic field,electric field,radio frequency
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