Optical Gradient Force In A Slot Waveguide On A Silicon-On-Insulator-Chip
2009 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1AND 2（2009）
Abstract
We present the fabrication and characterization of a subpicogram micromechanical oscillator in a slot waveguide that is actuated through optical gradient force. The tunable slot width in fact creates an optomechanical phase modulator on a Silicon-on-Insulator-Chip.
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Key words
silicon on insulator,force,slot waveguide,optical filters,chip,phase modulation,optical waveguides,oscillations
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