Research on Digital Simulation and Experiment of Removal Function of Bonnet Tool Polishing

In order to increase the surface accuracy and fabrication efficiency of optical element, Theoretical and experimental research on removing characteristics of ultraprecise bonnet polishing methods is made. Kinematic principles are applied to deduce the material removing function of bonnet polishing precesional motion based on Preston equation after the principle of bonnet polishing is analyzed. The removing function being approximate Gauss distribution is obtained by means of computer simulation. Simulation analysis of the effect on removal characteristics of Polishing movement in terms of several main parameters is made and three conclusions on Bonnet tool polishing technology are obtained. Two kinds of removing functions inosculate very well in terms of contrast experiments made on an ultraprecise bonnet intelligent polishing machine, and that an ultraprecise smooth surface with 0.0126μm figure precision is achieved. It provides a theoretical foundation for the research on bonnet polishing technology.