High excitation efficiency of channel plasmon polaritons in tailored, UV-lithography-defined V-grooves

Cameron L C Smith,Anil H Thilsted,Cesar E Garciaortiz,Ilya P Radko,Rodolphe Marie,Claus Jeppesen,Christoph Vannahme,Sergei I Bozhevolnyi,Anders Kristensen

Lasers and Electro-Optics（2014）

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Abstract

We demonstrate >50% conversion of light to V-groove channel plasmon-polaritons (CPPs) via compact waveguide-termination mirrors. Devices are fabricated using UV-lithography and crystallographic silicon etching. The V-shape is tailored by thermal oxidation to support confined CPPs.

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Key words

etching,optical fabrication,optical frequency conversion,optical waveguides,oxidation,photolithography,plasmons,polaritons,si,uv-lithography-defined v-grooves,v-groove channel plasmon-polaritons,channel plasmon polaritons,compact waveguide-termination mirrors,crystallographic silicon etching,high excitation efficiency,light conversion,tailored v-grooves,thermal oxidation,silicon

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