PMMA:C_(60)存储器件制备及其电双稳特性

Semiconductor Technology(2013)

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Abstract
采用氯苯/三氯甲烷混合溶剂配制聚甲基丙烯酸甲酯(PMMA):富勒烯(C60)溶液,运用旋涂法以氧化铟锡为基底制备薄膜,运用原子力显微镜对薄膜表面形貌进行表征。制备了ITO/PMMA:C60/Al结构的有机双稳态器件,采用伏安法对器件的电双稳态性能进行测试。最后,分析了有机层中的电荷陷阱对器件电双稳特性的影响。实验表明,当溶剂体积比为1:1时,薄膜粗糙度较低,以此薄膜为功能层制备的器件阈值电压为5.4 V,高/低电阻态的电阻比值达到32.1。器件的阈值电压随着薄膜表面粗糙的增加而加大。
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Key words
electrical bistability,memory device,organics,threshold voltage,surface morphology
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