High Temperature and High Sensitive NOx Gas Sensor with Hetero-Junction Structure using Laser Ablation Method
Transducers '05, Digest of Technical Papers, Vols 1 and 2(2006)
Abstract
In order to develop a high temperature (200 degrees C similar to 400 degrees C) and high sensitive NOx gas sensor, we developed a new structure of SiC-based hetero-junction device Pt/SnO2/SiC/Ni and Pt/WO3/SiC/Ni using a laser ablation method for the preparation of both metal (Pt) electrode and metal-oxide film. It was found that Pt/SnO2/SiC/Ni sensor show higher sensitivity to NO2 gas compared with the Pt/WO3/SiC/Ni sensor, whereas the Pt/WO3/SiC/Ni sensor had better sensitivity to NO gas. These results suggest that selective detection of NO and NO2 gases may be obtained by choosing different metal oxide films.
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Key words
SiC,hetero-junction device,NOx gas sensor
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