Design, Fabrication and Electrical Tests of Pad Sensors for the Electromagnetic Calorimeter of the Future Linear Collider Experiment

We have designed and fabricated silicon pad sensors for the electromagnetic calorimeter, to be used in the future linear collider experiment. The pad sensors have pixels with sizes of 0.98 x 0.98 cm(2) arranged in an active area of 6 x 6 cm(2). Such a pixel size is chosen so that, the calorimeter will meet its design goal in the resolution of the energy measurement. The pad sensors also have a structure of three guard rings outside of the active area, which have been proven to function well without high leakage current and breakdown. We present the design, fabrication, and electrical tests of the pad sensors.