Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

Simulation of Planarization Model Considered with Temperature Function in Patterned Cu CMP

Yeongil Shin,Haedo Jeong,Seonho Jeong,Youngwook Park,Jongmin Jeong

Asian Society for Precision Engineering and Nanotechnology (ASPEN 2022)（2022）

Cited 0|Views2
No score
Key words
patterned cu cmp,planarization model,temperature function,simulation
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined