非硅MEMS惯性开关弹道特性
Science Technology and Engineering（2011）
Abstract
针对国内缺乏对MEMS惯性开关弹道特性仿真研究这一问题,利用ANSYS软件对一种新型非硅MEMS惯性开关进行仿真研究,获得这种惯性开关弹道特性的仿真结果.结果验证了这种新型的非硅MEMS惯性开关具有高可靠性、更灵敏的碰目标响应,可进一步研究其实用价值.
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Key words
non-silicon MEMS inertia switch ballistic characteristics response of touch target response
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