Design and applications of large area RDRs

In recent years, MOVPE has become a versatile and economic production technology for most compound semiconductor applications. At EMCORE we continue to develop and improve high-speed Rotating Disk Reactors (RDRs). Our reactor technology has become accepted worldwide for high-throughput single and multi-wafer MOVPE systems. Our system is configured in accordance with the productivity and user friendliness of Si device processing equipment.