传统卤化银感光材料的生产工艺与集成电路制造工艺比较研究
Image Technology(2008)
Abstract
本文通过对传统卤化银感光材料的生产工艺中显影加工工序和集成电路制造工艺中光刻工序的比较研究,表明二者在工艺上具有某些相似点,相互之间可以借鉴。
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Key words
lithographic process,Integrated Circuit.,Silver Halide
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