Feasibility of Reflection Electron Energy Loss Spectroscopy with a Small Scattering Angle for Research in Surface Science

A reflection electron energy loss spectroscopy (R-EELS) system has been developed to investigate local surface atomic structures around light atoms such as C, N, and O. In this system, the primary electrons are incident on a surface at a grazing angle, and the electrons scattered inelastically at a small scattering angle are energy-analyzed to make the momentum transfer from the primary electrons to the scattered ones as small as possible. With this system, one can measure an energy loss near edge structure (ELNES) and an extended energy loss line structure (EXELFS), compared with an X-ray absorption near edge structure (XANES) and an extended X-ray absorption fine structure (EXAFS). The feasibility of the system in surface science is examined by measurements of ELNES and EXELFS for oxygen-adsorbed Ni(100) surfaces.