Optical characteristics study of the Cu-doped ZnO thin films

In order to prepare good crystalline quality of Cu-doped ZnO thin films and study its structure, the film was prepared by means of the pulsed laser deposition method with the Si substrate at different temperatures. In experiments a better crystal quality of Cu-doped ZnO thin film was prepared successfully. The specimens were measured and analyzed by means of Xray diffraction, scanning electron microscopy and photoluminescence spectrum. It was found that the prepared specimens appeared highly c-axis oriented, and the surface morphology of thin film was uniform and dense with the substrate at 300℃. In their photoIuminescence spectrums, besides the peak UV luminescence around 380nm, there was a peak blue light-emitting band around 460nm, which made it possible to emit blue light with ZnO films in practice. The results show that the crystal quality is seriously dependent on the growth temperature.