基于MEMS技术的微型热导检测器的研制
Instrument Technique and Sensor(2009)
Abstract
文中采用MEMS技术加工研制了一种新型热导检测器,这种微型热导检测器采用电阻率高、电阻温度系数大的Pt热敏电阻,利用MEMS技术将Pt薄膜沉积在Pyrex 7740玻璃上并通过剥离技术获得热敏电阻,而气体通道以及热导池是通过深刻蚀在硅片上刻蚀得到,热导池的体积为0.4μL.这种热导检测器具有灵敏度高,不受气流影响,不易氧化等特点,适用各种混合气体分离检测。
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Key words
thermal conductivity detector,thermal resistance,thermal conductivity cell
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