Extreme ultraviolet emission from non-relativistic electrons penetrating a multilayer nanostructure

The spectral and angular distributions from parametric X-radiation (PXR) from non-relativistic electrons penetrating a multilayer nanostructure are calculated while accounting for contributions of ordinary and diffracted transition radiation. The PXR emission mechanism is shown to be the dominant emission mechanism. The calculation also demonstrates the possibility of a tunable quasi-monochromatic extreme ultraviolet (EUV) source using only non-relativistic electrons whose efficiency can be large enough for practical applications.