Influence of SiN and ZnS films on transmittance of InAsSb/InAsPSb heterostructures

Applied Surface Science(2005)

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摘要
The transmittance of InAsSb/InAsPSb heterostructures is remarkably improved by depositing a Si3N4 top layer. This demonstrates its good anti-reflective property. A study of the influence of various factors on the transmittance of the heterostructures is performed. A comparison was made between the transmittances of the heterostructures under different conditions. The different effects of Si3N4 and ZnS top layers on the transmittance of the InAsSb/InAsPSb heterostructures are discussed.
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68. 47. Fg
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