光学薄膜折射率和厚度测试仪检定规程解读
Journal of Applied Optics(2007)
Abstract
简要介绍光学薄膜折射率和厚度测试仪检定规程的构成,被检测量仪器的技术指标、主要检定参数和检定方法等。该规程适用于光谱椭偏法测量光学薄膜折射率和厚度的仪器,在从事光学薄膜研究、生产和使用的单位具有广泛的应用前景。
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Key words
measurement of refractive index,verification regularation,measurement of thickness,optical film
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