Three-dimensional imaging at the mesoscopic scale using STEM-in-SEM

Tomography is a very powerful tool to investigate the three-dimensional structures of biological or materials specimens. However, the mesoscopic scale is covered neither by X-Ray tomography (insufficient spatial resolution) nor by electron tomography in a transmission electron microscope (too small reconstructed volume). We developed an electron tomography stage in a scanning electron microscope in order to obtain the missing information at the mesoscopic scale [1].