Three-dimensional imaging at the mesoscopic scale using STEM-in-SEM
EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany(2008)
Abstract
Tomography is a very powerful tool to investigate the three-dimensional structures of biological or materials specimens. However,
the mesoscopic scale is covered neither by X-Ray tomography (insufficient spatial resolution) nor by electron tomography in
a transmission electron microscope (too small reconstructed volume). We developed an electron tomography stage in a scanning
electron microscope in order to obtain the missing information at the mesoscopic scale [1].
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Key words
tomography, STEM, SEM, ESEM
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