Effect of chromatic aberration on atomic-resolved spherical aberration corrected STEM images.

The effect of the chromatic aberration (Cc) coefficient in a spherical aberration (Cs)- corrected electromagnetic lens on high-resolution high-angle annular dark field (HAADF) scanning transmission electron microscope (STEM) images is explored in detail. A new method for precise determination of the Cc coefficient is demonstrated, requiring measurement of an atomic-resolution one-frame through-focal HAADF STEM image. This method is robust with respect to instrumental drift, sample thickness, all lens parameters except Cc, and experimental noise. It is also demonstrated that semi-quantitative structural analysis on the nanometer scale can be achieved by comparing experimental Cs- corrected HAADF STEM images with their corresponding simulated images when the effects of the Cc coefficient and spatial incoherence are included.