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发动机挺柱沉积类金刚石薄膜的工艺及性能

HUANG Ping, ZHANG Ying-ying, ZHANG Bin, FAN Mei-mei, LI Xing-Jie, QIANG Li

Electroplating & Finishing（2013）

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Abstract
采用磁控溅射法,以Cr、Ti和石墨为靶材,Ar、N2和CH4为溅射气体,在材料为20CrMo的发动机挺柱上利用多层梯度复合技术沉积了低摩擦类金刚石(DLC)薄膜复合层CrTi/CrTiN/CrTiC/DLC.该薄膜复合层的纳米压痕硬度高达13 GPa,结合力为50 N,表面粗糙度为0.398 nm.在SRV-IV微动摩擦磨损试验机上进行耐磨损试验后,DLC复合薄膜挺柱的磨损率为渗碳挺柱的1/6.该研究技术具有自主知识产权,实现了挺柱批量化覆膜加工,并有望在发动机主要摩擦副上推广应用.
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Key words
tappet,diamond-like carbon,thin film,magnetron sputtering,friction,wear
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