Highly Sensitive VGA FEA-HARP Image Sensor

A 640×480 pixel image sensor consisting of 20×20-μm pixels, which consisted of an integrated field emitter array equipped with an active drive circuit and a highly sensitive avalanche-mode photoconductive target was fabricated and tested to investigate the feasibility of a high-resolution sensor with a large number of smaller pixels. Our experimental results revealed that the prototype obtained both high sensitivity due to the avalanche multiplication effect of the target and sufficient resolution as a VGA image sensor.