MgO-Based Tunnel Junction Material for High-Speed Toggle Magnetic Random Access Memory

IEEE Transactions on Magnetics(2006)

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Abstract
We report the first demonstration of a magnetoresistive random access memory (MRAM) circuit incorporating MgO-based magnetic tunnel junction (MTJ) material for higher performance. We compare our results to those of AlOx-based devices, and we discuss the MTJ process optimization and material changes that made the demonstration possible.We present data on key MTJ material attributes for different ox...
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Key words
Magnetic tunneling,Annealing,Junctions,Temperature measurement,Oxidation,Resistance,Sputtering
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