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Process control strategy of the silicon sensors production for the CMS tracker

T Bergauer, J.C Fontaine,J.M Helleboid,M Krammer, A Macchiolo

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment（2002）

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Abstract
In the framework of the CMS experiment, a quality control of the silicon sensors production has been developed for the tracker construction. The emphasis here is on the process stability control based on the characterization of test-structures made of eight different components. The measurements carried out are presented. Then the set-up and the software developed for this purpose are explained. The first results, including the ones obtained on faulty batches of sensors, are shown.
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29.40.Wk,29.40.Gx,85.30.De
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