A Mems-Actuated Tunable Microdisk Resonator
2003 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS（2003）
摘要
A novel tunable microdisk resonator with integrated MEEMS actuator to alter coupling gap is proposed and experimentally demonstrated for the first time. The fabricated device shows a transmittance change about 8dB and a quality factor of 6200.
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关键词
quality factor
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