Fabrication Of Ceramic-Based Passive Mixers For Microfluidic Application By Thick Film Lithography

Microfluidic device can be applied in a wide range of chemical and biological technology. In this paper, ceramic-based T-type passive mixers for microfluidic applications were fabricated by LTCC process combined with thick film photolithography. The base ceramic material in thick film was amorphous cordierite ((Mg,Ca)(2)Al4Si5O18) and photoimageable polymers were added to give a photosensitivity. Two types of passive mixer, which showed the channel width of 1.0 mm and 200 mu m, respectively, were designed considering mixing efficiency in the channel and their microfluidic properties were discussed in detail.