Electron spin resonance of palladium-related defect in silicon

A different Pd-related defect from a substitutional Pd with (C2v) symmetry was detected by ESR measurement. New ESR signal of the Pd-related defect showed different g-value and symmetry from those of the substitutional Pd. The Pd-related defect has anisotropic character of monoclinic (C1h) symmetry. The calculated g-values are g1=1.97, g2=2.03, g3=2.16, and the g1 axis is along 〈110〉 direction. The g2 and g3 axes are perpendicular to the g1 axis, and the g2 axis is rotated from 〈100〉 to 〈111〉 direction at the angle of 51°. In addition to the Pd-related defect, we have found other ESR signals in Pd and hydrogen-diffused Si. The ESR signals showed the hyperfine structure of hydrogen. Therefore, it is though that the ESR signals are originated from Pd–H complex defect.