Fabrication Of L1(0)-Fept Thin Films By Rapid Thermal Annealing

Fabrication of L1(0)-FePt thin films by using conventional thermal annealing and indirect rapid thermal annealing is studied. By using conventional thermal annealing, L1(0)-FePt thin films are fabricated over 500 degrees C. By using the rapid thermal annealing, it was found that the formation temperature of L1(0)-FePt thin films decreases effectively. In addition, this method enables to prevent the grain growth due to annealing.