High-Quality Superconducting Thin-Films By Sputtering

High quality superconducting thin films of YBaCuO and Bi(Pb)SrCaCuO were reproducibly prepared by ion beam sputtering and rf magnetron sputtering from a single bulk target or a single off-stoichiometry powder target. The substrates with (100) surfaces of YSZ, SrTiO3, LaAlO3 and MgO were used. We review our work on the synthesis of these thin films obtained by both in situ deposition and postannealing method. The details of thin film growth, superconducting properties, morphology, film-substrate interdiffusions, structures and crystallinities were presented and discussed.