53.1: Fabrication of CNT Emitter Array with Polymer Insulator

Kunihiko Nishimura,Akihiko Hosono,Satoru Kawamoto,Yosuke Suzuki,Naoki Yasuda,Shuhei Nakata,Shoyu Watanabe,Takao Sawada,Fumio Abe,Tetsuya Shiroishi,Masahiro Fujikawa, Zhiyings Shen,Soichiro Okuda,Yoshinobu Hirokado

Sid Symposium Digest of Technical Papers（2005）

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摘要

A new method of fabricating CNT emitter array using polymer insulator with low outgassing has been developed. A dry etching process without the damage on the CNT has been found and it proved to decrease the turn-on voltage. Better emission properties than conventional insulator has been obtained.

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