Modeling and Simulation of Integrated Piezo-resistive Pressure Sensors

Summary Basically, integrated piezo-resistive sensing elements exhibit parasitic effects that have to be suppressed as necessary. To ensure the proper function of such integrated elements design-driven modeling and simulations have to be performed. This kind of modeling and simulation is extremely useful for determining operation characteristics and verifying performance before manufacturing. Thus, the need for test iterations decreases, and therefore, cost and time-to-market can be reduced significantly. Based on simulations with commercial CAD systems (ANSYS, ADVanceMS, ATHENA) and an advanced behavioral model for integrated sensors, a seamless design-driven modeling and simulation flow has been developed and implemented. This new approach enhanced with first results will be presented.