Microporous Silica Films

A narrow range of pore radii, pore diameters of 6 +/- 2 angstrom, and a porosity of 14% characterize the silicon dioxide films which can be made by the electron beam evaporation of quartz. Thus they offer an alternative to zeolite films for the separation of liquids and gases, and applications in nonlinear optics and microelectronic sensors.