Contactless gigahertz testing
International Test Conference(1998)
Abstract
Circuit internal test techniques working in a contactlessmanner are necessary for failure analysis and designverification. This paper gives an overview of the mostimportant contactless test techniques. For the mechanicalsensors, the electron beam test, the electro-optic sampling,and the electric scanning force microscopy the state-of-the-artin respect to gigahertz testing will be discussed. Somemeasurement examples will be given. In more detail a newtechnique, the electric scanning force microscopy, will bediscussed.
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Key words
somemeasurement example,electron beam test,contactless gigahertz testing,state-of-the-artin respect,mostimportant contactless test technique,electro-optic sampling,failure analysis,circuit internal test technique,force microscopy,spatial resolution,electron beam,sampling methods,frequency
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